FLAT BED SCAN MODULE, FLAT BED SCAN SYSTEM, FLAT BED SCAN MODULE ALIGNMENT ERROR MEASUREMENT JIG AND FLAT BED SCAN MODULE ALIGNMENT ERROR MEASUREMENT METHOD USING FLAT BED SCAN MODULE ALIGNMENT ERROR MEASUREMENT JIG

摘要

PROBLEM TO BE SOLVED: To provide a flat bed scan module, a flat bed scan system, a flat bed scan module alignment error measurement jig and an alignment error measurement method using the flat bed scan module alignment error measurement jig that can reduce a measurement error by automatically scanning a shape of a flat plate.;SOLUTION: A flat bed scan module 10 is a scan module for scanning the shape of the flat plate, and includes: a first laser oscillation part 12 and a second laser oscillation part 14 that are positioned at both ends of one side of a virtual quadrangle, respectively and emit a linear laser beam to the flat plate; a third laser oscillation part 16 and a fourth laser oscillation part 18 that are positioned at both ends of the other side adjacent to the one side of the quadrangle, respectively and emit the linear laser beam to the flat plate; a camera 20 that is positioned at a center part of the quadrangle and photographs the laser beam reflected from the flat plate; and a frame 24 that supports the first to fourth laser oscillation parts and the camera.;COPYRIGHT: (C)2014,JPO&INPIT