Wavelength variable interference filter, manufacturing method of wavelength variable interference filter, optical filter device, optical module, and electronic apparatus

摘要

A movable substrate of a wavelength variable interference filter includes a movable portion and a groove which is provided outside of the movable portion, in a plan view when the movable substrate is seen from a substrate thickness direction, the groove includes a bottom surface having an even groove depth dimension and a side surface which is continued to the bottom surface, and the side surface is configured with arc-like first curved surface portion and second curved surface portion, in a cross-sectional view when the movable substrate is cut along the substrate thickness direction.