WAVELENGTH-VARIABLE INTERFERENCE FILTER, METHOD FOR MANUFACTURING WAVELENGTH-VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a small wavelength-variable interference filter, a method for manufacturing a wavelength-variable interference filter, an optical filter device, an optical module, and an electronic apparatus.;SOLUTION: A wavelength-variable interference filter 5 includes a fixed substrate 51, a movable substrate 52 disposed to oppose to the fixed substrate 51, a fixed reflection film 54 disposed on the fixed substrate 51, partially reflecting incident light and partially transmitting the light, and a movable reflection film 55 disposed on the movable substrate 52, opposing to the fixed reflection film 54, partially reflecting the incident light and partially transmitting the light. The movable substrate 52 includes a movable part 521 and a groove 526 disposed outside the movable part 521 in a plan view of the movable substrate 52 observed in a substrate thickness direction. The groove 526 is formed by wet-etching after machining.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT