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FIELD EFFECT TRANSISTOR COMPRISING BLACK PHOSPHORUS AND BACK PHOSPHORUS REDUCTION AND OXIDATION PREVENTION METHOD BY TRANSITION METAL
FIELD EFFECT TRANSISTOR COMPRISING BLACK PHOSPHORUS AND BACK PHOSPHORUS REDUCTION AND OXIDATION PREVENTION METHOD BY TRANSITION METAL
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机译:含过渡磷的黑磷和反磷还原及氧化防止方法的场效应晶体管
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摘要
The present invention relates to a method of reducing an oxide layer formed on a black phosphorus surface using a transition metal. The method includes a step of peeling off a black debris; and a step of depositing a transition metal on the exfoliated black phosphorus surface. According to the present invention, by depositing a transition metal on a black phosphorus surface on which an oxide layer is formed, electrical performance degradation due to the oxidation of black phosphorus can be prevented by a simple method. It can be used for a low dimensional high performance semiconductor material.;COPYRIGHT KIPO 2016
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