首页> 外国专利> FIELD EFFECT TRANSISTOR COMPRISING BLACK PHOSPHORUS AND BACK PHOSPHORUS REDUCTION AND OXIDATION PREVENTION METHOD BY TRANSITION METAL

FIELD EFFECT TRANSISTOR COMPRISING BLACK PHOSPHORUS AND BACK PHOSPHORUS REDUCTION AND OXIDATION PREVENTION METHOD BY TRANSITION METAL

机译:含过渡磷的黑磷和反磷还原及氧化防止方法的场效应晶体管

摘要

The present invention relates to a method of reducing an oxide layer formed on a black phosphorus surface using a transition metal. The method includes a step of peeling off a black debris; and a step of depositing a transition metal on the exfoliated black phosphorus surface. According to the present invention, by depositing a transition metal on a black phosphorus surface on which an oxide layer is formed, electrical performance degradation due to the oxidation of black phosphorus can be prevented by a simple method. It can be used for a low dimensional high performance semiconductor material.;COPYRIGHT KIPO 2016
机译:本发明涉及使用过渡金属还原形成在黑磷表面上的氧化物层的方法。该方法包括剥离黑屑的步骤;以及在剥离的黑磷表面上沉积过渡金属的步骤。根据本发明,通过在其上形成有氧化物层的黑磷表面上沉积过渡金属,可以通过简单的方法防止由于黑磷的氧化而导致的电性能下降。可用于低尺寸高性能半导体材料。; COPYRIGHT KIPO 2016

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