DMD EXPOSURE OPTICS FOR ADJUSTING DIRECTION OF IRRADIATING LIGHT INCIDENT ON DIGITAL MICROMIRROR DEVICE AND LIGHT ILLUMINATION OPTICS THEREOF

摘要

The present invention relates to an exposure optical system capable of controlling the direction of radiating light radiated to a digital micromirror device (DMD) and a light radiating optical system forming the same. According to the present invention, the light radiating optical system includes: a light source; a first prism including a first reflection surface reflecting light radiated from the light source at a first angle, wherein the first prism also includes a second reflection surface reflecting the light reflected from the first reflection surface at a second angle by being installed to be parallel to the first reflection surface or to have a predetermined angle to the first reflection surface on a radiating path of the light reflected from the first reflection surface; and a second prism including a third reflection surface reflecting the light passing through the first prism at a third angle, wherein the second prism also includes a fourth reflection surface to which the DMD receiving output light passing through the third reflection surface is attached, wherein at least a side of the fourth reflection surface is folded on the third reflection surface. According to the present invention, the light radiating optical system can selectively design the direction of the radiated light radiated to the DMD by controlling an arrangement direction and the shape of a three-dimensional prism and can control the direction of the radiated light by rotating an upper or lower prism after the arrangement as the light radiating optical system uses a rotating prism.