DMD EXPOSURE OPTICS FOR ADJUSTING DIRECTION OF IRRADIATING LIGHT INCIDENT ON DIGITAL MICROMIRROR DEVICE AND LIGHT ILLUMINATION OPTICS THEREOF

摘要

The present invention relates to an exposure optical system capable of controlling the direction of irradiation light incident on a DMD and a light irradiation optical system constituting the same. The light irradiation optical system of the present invention has a light source, a first reflection surface for reflecting light incident from the light source at a first angle, and parallel or predetermined to the first reflection surface on a traveling path of light reflected by the first reflection surface. A first prism disposed to form an angle of the first prism including a second reflecting surface reflecting light reflected from the first reflecting surface at a second angle, and a second reflecting light passing through the first prism at a third angle; And a second prism including a third reflecting surface and a fourth reflecting surface having a DMD (Digital Micromirror Device) receiving at least one side in contact with the third reflecting surface and receiving output light passing through the third reflecting surface. . According to the present invention, it is possible to selectively design the direction of the irradiation light incident on the DMD by adjusting the shape and the arrangement direction of the three-dimensional prism. Can be adjusted.