Time-of-flight sensor and time-of-flight sensor module for a time-of-flight distance measuring system and corresponding time-of-flight distance measuring system

摘要

The invention relates to a light travel time sensor (22) for a light travel time distance measuring system (10), in particular for a light travel time camera system (10 '), with a semiconductor substrate (36) as the base (38) and at least one pixel (42) arranged on one side (40) ), the light transit time sensor (22) on this side (40) having photosensitive areas (44) and non-photosensitive areas (46). It is provided that the sensor (22) has at least one absorber structure (52) for reducing scattered light (50) on this side (40) of the time-of-flight sensor (22), which is arranged on at least one of the non-photosensitive areas (46) and which at least partially covers this non-photosensitive region (46) and thereby forms at least one cavity absorber (54) a corresponding time-of-flight distance measuring system (10).