Time-of-flight sensor and time-of-flight sensor module for a time-of-flight distance measurement system and a corresponding time-of-flight distance measurement system

摘要

Time-of-flight sensor (22) for a time-of-flight distance measuring system (10), in particular for a time-of-flight camera system (10 '), with a semiconductor substrate (36) as a base (38) and at least one pixel (42) arranged on one side (40), the Time-of-flight sensor (22) on this side (40) has photosensitive areas (44) and non-photosensitive areas (46), with at least one absorber structure (52) for reducing scattered light (50) on this side (40) of the time-of-flight sensor (22) , which is arranged on at least one of the non-photosensitive areas (46), characterized in that the absorber structure (52) at least partially covers this non-photosensitive area (46) and thereby forms at least one cavity absorber (54), and that the absorber structure (52) or at least one of the absorber structures (52) has a T-shaped contour (56).