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In Situ Fabrication of Vertical Multilayered MoS2/Si Homotype Heterojunction for High-Speed Visible-Near-Infrared Photodetectors

机译:垂直多层MoS2 / Si同质异质结在高速可见近红外光电探测器中的原位制备

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摘要

C2D transition metal dichalcogenides (TMDCs)-based heterostructures have been demonstrated to achieve superior light absorption and photovoltaic effects theoretically and experimentally, making them extremely attractive for realizing optoelectronic devices. In this work, a vertical multilayered n-MoS2-silicon homotype heterojunction is fabricated, which takes advantage of multilayered MoS2 grown in situ directly on plane silicon. Electrical characterization reveals that the resultant device exhibits high sensitivity to visible-near-infrared light with responsivity up to 11.9 A W-1. Notably, the photodetector shows high-speed response time of approximate to 30.5 mu s/71.6 mu s and capability to work under higher pulsed light irradiation approaching 100 kHz. The high response speed could be attributed to a good quality of the multilayer MoS2, as well as in situ device fabrication process. These findings suggest that the multilayered MoS2/Si homotype heterojunction have great potential application in the field of visible-near-infrared detection and might be used as elements for construction of high-speed integrated optoelectronic sensor circuitry.
机译:基于C2D过渡金属二硫化碳(TMDC)的异质结构已在理论上和实验上实现了优异的光吸收和光电效应,使其对于实现光电器件极具吸引力。在这项工作中,制造了垂直多层n-MoS2 / n-硅同质异质结,它利用了直接在平面硅上原位生长的多层MoS2的优势。电学特征表明,所得器件对可见-近红外光表现出高灵敏度,响应度高达11.9 A W-1。值得注意的是,该光电探测器显示出大约30.5μs/ 71.6μs的高速响应时间,并且能够在接近100 kHz的更高脉冲光照射下工作。高响应速度可归因于多层MoS2的良好质量以及原位器件制造工艺。这些发现表明,多层MoS2 / Si同质异质结在可见光-近红外检测领域具有巨大的潜在应用,并可作为构建高速集成光电传感器电路的元件。

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