Development of active six-degrees-of-freedom micro-vibration control system using hybrid actuators comprising air actuators and giant magnetostrictive actuators

摘要

In recent years, there has been an increasing demand for micro-vibration free space from industrial and scientific organizations. In response to this demand, several active micro-vibration control systems utilizing various types of actuators have been developed and applied in various environments and to a number of machines. The authors have developed an active micro-vibration control system with six degrees of freedom using giant magnetostrictive (GMS) actuators and actually have applied it to an FIB (focused ion beam).