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Fabrication of zinc oxide nanostructures using solvent-assisted capillary lithography

机译:使用溶剂辅助毛细管光刻技术制备氧化锌纳米结构

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摘要

We present a simple solvent-assisted capillary molding method to fabricate zinc oxide (ZnO) nanostructures using an ultraviolet (UV) curable polyurethane acrylate (PUA) mold. A thin film of the ZnO sol-gel precursor solution in methyl alcohol was prepared by spin coating on a solid substrate and subsequently a nanopatterned PUA mold was brought into conformal contact with the substrate under slight physical pressure (approx 3.5 bar). After annealing at 230 deg C for 4 h, well-defined ZnO nanostructures formed with feature size down to approx 50 nm, aided by capillary rise and solvent evaporation. It was found that the height of capillary rise depended highly on the applied pressure. A simple experimental setup was devised to examine the effects of pressure, revealing that the optimum pressure ranged from 3.5 bar to 5 bar. Also, ZnO nanorods could be selectively grown on patterned regions using the seed layer as a pseudocatalyst when the width of the seed layer was larger than approx 200 nm.
机译:我们提出了一种简单的溶剂辅助毛细管成型方法,以使用紫外线(UV)固化聚氨酯丙烯酸酯(PUA)模具制造氧化锌(ZnO)纳米结构。通过在固体基材上旋涂制备ZnO溶胶-凝胶前体在甲醇中的薄膜,然后在轻微的物理压力(约3.5 bar)下使纳米图案的PUA模具与基材保形接触。在230摄氏度下退火4小时后,借助毛细管上升和溶剂蒸发,形成了特征尺寸低至约50 nm的清晰定义的ZnO纳米结构。发现毛细管上升的高度很大程度上取决于所施加的压力。设计了一个简单的实验装置来检查压力的影响,发现最佳压力范围为3.5 bar至5 bar。同样,当种子层的宽度大于大约200 nm时,可以使用种子层作为伪催化剂在图案化区域上选择性生长ZnO纳米棒。

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