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Synthesis of silicon nanotubes with cobalt silicide ends using anodized aluminum oxide template

机译:阳极氧化铝模板合成硅化钴末端硅纳米管

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摘要

Silicon nanotubes (SiNTs) are compatible with Si-based semiconductor technology. In particular, the small diameters and controllable structure of such nanotubes are remaining challenges. Here we describe a method to fabricate SiNTs intrinsically connected with cobalt silicide ends based on highly ordered anodic aluminum oxide (AAO) templates. Size and growth direction of the SiNTs can be well controlled via the templates. The growth of SiNTs is catalyzed by the Co nanoparticles reduced on the pore walls of the AAO after annealing, with a controllable thickness at a given growth temperature and time. Simultaneously, cobalt silicide forms on the bottom side of the SiNTs.
机译:硅纳米管(SiNT)与基于Si的半导体技术兼容。特别地,此类纳米管的小直径和可控结构仍然是挑战。在这里,我们描述一种基于高度有序的阳极氧化铝(AAO)模板来制造与硅化钴末端固有连接的SiNT的方法。可以通过模板很好地控制SiNT的尺寸和生长方向。退火后,在AAO的孔壁上还原的Co纳米颗粒还原了SiNTs的生长,在给定的生长温度和时间下,厚度可控。同时,在SiNT的底面上形成硅化钴。

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