Mass-fabricated one-dimensional silicon nanogaps for hybrid organicanoparticle arrays

摘要

Optical lithography based on microfabrication techniques was employed to fabricate one-dimensional nanogaps with micrometre edge lengths in silicon. These one-dimensional nanogaps served as a platform on which organicanoparticle films were assembled. Characterization of the gaps was performed with high-resolution TEM, SEM, and electrical measurements. Novel self-assembling attachment chemistry, based on the interaction of silicon with a diazonium salt, was used to iteratively build a multi-layer nanoparticle film across a 7 nm gap. By using nanoparticles capped with an easily displaced ligand, a variable conductive path was created across the 1D nanogap. Electrical measurements of the gap showed a dramatic change in the I(V) characteristics after assembly of the nanoparticle film.