We report our recent results of the effect of deuterium termination on the optical properties of porous Si nanostructures. The photoluminescence (FL) spectrum of deuterium-terminated porous Si (D-PS) was different from that of ordinary hydrogen-terminated porous Si (H-PS) although H-PS and D-PS show the same structure and the same absorption spectrum. We quantitatively discuss these results based on the trapping of conduction electrons at a surface Si-H or Si-D. In addition to these basic results, we also show that the replacement of hydrogen with deuterium reduces the FL degradation. Surface termination, especially photo-induced oxidation of the surface, was precisely studied by Fourier transform infrared absorption measurements.
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