Patterned carbon nanotube growth using an electron beam sensitive direct writable catalyst

摘要

This paper reports the use of spin coatable Fe naphthenate (Fe(C1 1H702)2) as an electron beam sensitive direct writable catalyst suitable for growing high quality carbon nanotubes (CNTs). Vertically aligned, densely packed, equal in height, three- to four-walled and 5-7 nm inner diameter CNTs were grown on the nanoscale stripe patterns by water-assisted chemical vapor deposition. The correlation between electron beam dosage and the growth characteristics of CNTs is also discussed.