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Micromoulding of three-dimensional photonic crystals on silicon substrates

机译:硅基板上的三维光子晶体的微成型

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摘要

The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC i.e. to use the substrate as a mould is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.
机译:据报道,在图案化的硅基板上生长了三维光子晶体(PhC)。结果表明,深沟槽可以通过以紧密堆积的面心立方晶格中的聚合物微球的自组装均匀地填充。比较了不同通道宽度的晶体质量。这些观察结果通过可见光范围内的光学反射率测量得到证实,显示出增强的反射带宽。还展示了分离PhC的可能性,即,将基板用作模具。讨论了这种方法在构建基于PhC的复杂体系结构方面的潜力。

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