Gas sensors based on deposited single-walled carbon nanotube networks for DMMP detection

摘要

Sensors based on single-walled carbon nanotube (SWNT) networks were fabricated and their sensitive properties for the nerve agent stimulant dimethyl methylphosphonate (DMMP) vapor were investigated at room temperature. The SWNT networks were deposited on oxidized silicon surface functionalized with 3-aminopropyltrimethysilane (APS). Combining with a traditional silicon process, SWNT-based gas sensors were made at a wafer scale. The effects of the density of deposited SWNTs on the sensor response were studied. The excellent response is obtained under a density of 30-40 tubes μm~(-2). The sensors exhibit high resistance response, fast response time, rapid recovery and good reproducibility for DMMP vapor. The deposited SWNT sensors will be potentially extended to large-scale fabrication.