Automated setup for non-tactile high-precision measurements of roundness and cylindricity using two laser interferometers

摘要

An automated setup for non-tactile high-precision measurements of roundness and cylindricity of ring gauges is presented. The aim is to minimize classical problems of tactile and radial roundness measurements such as the error influences of the used rotary table and the work piece alignment and thus to increase the accuracy and reduce the measurement time. To achieve those aims, a double interferometer concept was chosen and combined with a measurement system for the work piece alignment, a high-precision rotary table and an automated four-axis adjustment unit. The main alignment errors of the work pieces (e.g. ring gauges) such as eccentricity and tilting are either suppressed or directly detected and consequently reduced by the automated four-axis adjustment unit. Due to the non-tactile measurement concept, higher measurement velocities are achievable and surface destruction is prevented. In combination with the contactless energy supply of the four-axis adjustment unit, the radial run of the rotary table is not affected.