NANOELECTROMECHANICAL SWITCHES FOR RECONFIGURABLE ANTENNAS

摘要

We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3μm, width = 60 nm). The NEMS switch used in this work has the same architecture with low voltage, double-arm cantilever-type metallic DC-contact microelectromechanical system (MEMS) switch recently developed in author's group. The microfabrication and characterization of the MEMS switch have also been given in this article.