A 94 GHz LOW-COST FREQUENCY SOURCE USING A 47 GHz MICROMACHINED AIR-CAVITY OSCILLATOR AND A DOUBLER

摘要

A 94 GHz low-cost frequency source has been developed using a 47 GHz micromachined air-cavity oscillator and a 47-to-94 GHz doubler on the thin-film substrate with the flip-chip interconnection. The 47 GHz micromachined air-cavity oscillator is a parallel-feedback configuration using the micromachined air-cavity as a parallel-feedback element. As active devices of the oscillator and the doubler, GaAs pseudomorphic high-electron mobility transistors were flip-chip mounted on the thin-film substrate with integrated passives. The developed 94-GHz frequency source has an output power of about 3 dBm and a low-phase-noise of -96 dBc/Hz at 1 MHz offset with an oscillation frequency at 94.25 GHz. This work allows a low-cost millimeter-wave frequency source.