MICROSTRUCTURAL, OPTICAL, AND MECHANICAL PROPERTIES OF REACTIVE ELECTRON-BEAM-COEVAPORATED TIO2-MGF2 COMPOSITE FILMS

摘要

The composition-dependent structural, microstructural, optical, and mechanical properties of TiO2-MgF2 composite films prepared by reactive electron-beam coevaporation at a substrate temperature of 280 degrees C are systematically investigated with an x-ray diffractometer, transmission electron microscope, spectrophotometer and varied angle of incidence spectroscopic ellipsometry, and microhardness tester, respectively. A comparison of the films prepared by reactive ion-assisted coevaporation shows that the films prepared by reactive electron-beam coevaporation have lower refractive indices and hardnesses. However, TiO2-MgF2 composite films prepared by both techniques exhibit similar softening and hardening phenomena and similar microstructures. (C) 1996 Optical Society of America [References: 21]