Optical and structural properties of Ag-Si_(3)N_(4) nanocermets prepared by means of ion-beam sputtering in alternate and codeposition modes

摘要

Ion-beam sputtering deposition has been used in two ways, as granular multilayers and as cosputtered film, to elaborate Ag-Si_(3)N_(4) nanocermets. Multilayer deposition creates slightly oblate clusters, and cosputtering produces two cluster families: elongated clusters within the Si_(3)N_(4) matrix and larger ones at the film surface. The transmittance spectra of these nanocermets are characterized by a surface plasmon resonance. In the reported research the position of this resonance is related to the morphological properties of silver nanoclusters, which are studied by transmission-electron microscopy, grazing-incidence small-angle x-ray scattering, and atomic-force microscopy.