Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5-6.9-nm wavelength region

摘要

We applied a Mo/B4C multilayer coating to a laminar holographic grating with 2400 grooves/mm and a 1-m radius of curvature. By use of synchrotron soft x rays the multilayer-coated grating was evaluated to have diffraction efficiencies of 3.1% and 0.017% for s- and p-polarized radiation, respectively, at a 6.7-nm wavelength at a 45.35degrees grazing angle of incidence in the + 1 (inside) grating order. Thus the polarizance was estimated to be 98.9% at least. The zero-order peak was suppressed by the destructive interference caused by the groove profile. (C) 2002 Optical Society of America. [References: 11]