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Fourier transform interferometer alignment method

机译:傅立叶变换干涉仪对准方法

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摘要

A rapid and convenient method has been developed to facilitate the alignment of the image-plane components of point-diffraction interferometers, including the phase-shifting point-diffraction interferometer. In real time, the Fourier transform of the detected image is used to calculate a pseudoimage of the electric field in the image plane of the test optic where the critical alignment of various optical components is performed. Reconstruction of the pseudoimage is similar to off-axis, Fourier transform holography. Intermediate steps in the alignment procedure are described. Fine alignment is aided by the introduction and optimization of a global-contrast parameter that is easily calculated from the Fourier transform. Additional applications include the alignment of image-plane apertures in general optical systems, the rapid identification of patterned image-plane alignment marks, and the probing of important image-plane field properties.
机译:已经开发出一种快速方便的方法来促进对准点衍射干涉仪(包括相移点衍射干涉仪)的像平面分量。实时地,使用检测到的图像的傅立叶变换来计算测试光学器件像面上的电场的伪图像,在该伪像中执行各种光学组件的关键对准。伪图像的重建类似于离轴傅立叶变换全息术。描述了对准过程中的中间步骤。通过引入和优化可以从傅立叶变换轻松计算出的全局对比度参数,可以实现精细对齐。其他应用包括常规光学系统中像平面孔径的对准,图案化像平面对准标记的快速识别以及重要像平面场特性的探测。

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