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Precise interferometric length and phase-change measurement of gauge blocks based on reproducible wringing

机译:基于可重复拧紧的量规块的精确干涉长度和相变测量

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摘要

A modern fringe-pattern-analyzing interferometer with a resolution of 1×10~(-9) and without exclusion of systematic uncertainties owing to optic effects of less than 1 nm was used to test a new method of interferometric length measurement based on a combination of the reproducible wringing and slave-block techniques. Measurements without excessive wringing film error are demonstrated for blocks with nominal lengths of 2-6 mm and with high surface flatness. The uncertainty achieved for these blocks is less than 1 nm. Deformations of steel gauge blocks and reference platens, caused by wringing forces, are investigated, and the necessary conditions for reproducible wringing are outlined. A subnanometer uncertainty level in phase-change-correction measurements has been achieved for gauge blocks as long as 100 mm. Limitations on the accuracy standard method of interferometric length measurements and shortcomings of the present definition of the length of the material artifact are emphasized.
机译:一种现代的条纹图分析干涉仪,其分辨率为1×10〜(-9),并且由于光学效应小于1 nm而没有排除系统不确定性,用于测试基于组合的干涉长度测量的新方法可复制的拧紧和从属块技术。对于标称长度为2-6 mm且具有高表面平整度的块,证明了在测量过程中不会出现过度的扭曲膜误差。这些模块实现的不确定度小于1 nm。研究了拧紧力导致的钢制量块和参考压板变形,并概述了可重复拧紧的必要条件。对于长达100 mm的量块,在相变校正测量中已达到亚纳米不确定度。强调了干涉式长度测量的精度标准方法的局限性以及目前对材料伪影的长度定义的缺点。

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