Fabrication of photonic crystal lasers by nanomolding of solgel glasses

摘要

We demonstrate the formation, in a single process step, of periodic arrays of features of surface relief with submicrometer lateral dimensions in hybrid organic and inorganic solgel glasses by using elastomeric molding techniques. Lasers formed with molded photonic crystal resonators that consist of triangular, square, and honeycomb lattices of cylindrical pests and holes show emission spectra and lasing thresholds that are similar to devices formed by conventional high-resolution photolithographic patterning of thick layers of thermally grown oxide.