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Stripe color separation with diffractive optics

机译:衍射光学条纹分离

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摘要

We describe a color separation optical element with potential display applications that is designed to separate light into an array of red, green, and blue stripes formed at a certain distance from the component. The stripe color separation grating is a surface-relief diffractive optical element composed of a repeated pattern of three constituent gratings. We describe the design principles and a numerical analysis of the component, showing that a maximum theoretical efficiency with which the colors are directed into the stripes is ~80%. We also examine the dependence of the efficiency on the grating feature size. In addition, we report on the fabrication of four of these components, using a combination of electron-beam lithography and photolithography with a backexposure technique. Measurements are presented to show the color separation property.
机译:我们描述了具有潜在显示应用的分色光学元件,该分色光学元件旨在将光分离为与组件有一定距离的红色,绿色和蓝色条纹阵列。条纹分色光栅是由三个组成光栅的重复图案组成的浮雕型衍射光学元件。我们描述了组件的设计原理和数值分析,结果表明,将颜色定向到条纹中的最大理论效率为〜80%。我们还检查了效率对光栅特征尺寸的依赖性。此外,我们报告了结合使用电子束光刻和光刻技术以及背面曝光技术制造的这四个组件的过程。进行测量以显示分色特性。

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