Detection of defects in multiple-layer structures by using surface plasmon resonance

摘要

A method for diagnosing a silver-dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag-dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer.(dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag-polymer interface. (C) 1997 Optical Society of America.