CONSEQUENCES OF TI-, LI-, AND ER-ION IMPLANTATIONS ON THE OPTICAL PROPERTIES OF SINGLE LAYERS OF TA2O5

摘要

Tantalum pentoxide (Ta2O5) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10(-6)) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties. (C) 1996 Optical Society of America [References: 16]