The implementation of a two-stage design process for the design of diffractive optical elements for array illumination is described. Results are presented for on-axis two-dimensional array illuminators for which this method is used. The final designs are theoretically within 5% of the calculated diffraction efficiency upper bound, and theoretical signal reconstruction error is below 1%. Experimental verification of the design theory is given, with experimental diffraction efficiencies within 4% of design values and signal reconstruction error below 6%.#1997 Optical Society of America
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