Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles

摘要

Surface features are measured by the analysis of the diffracted field intensity distribution generated by a scanning Gaussian beam. The measured data are shown to represent the amplitude of the Gabor expansion coefficients of the complex function embossed by the surface onto the reflected wave front. The surface is reconstructed by use of a custom-designed algorithm based on generalized projections, with a resolution exceeding the classical diffraction limit. #1997 Optical Society of America