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Fabrication and characterization of a planar gradient-index, plasma-enhanced chemical vapor deposition lens

机译:平面梯度指数,等离子增强化学气相沉积透镜的制备和表征

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摘要

A thin, one-dimensional, gradient-index slab lens with a parabolic profile was designed and fabricated in fluorine-doped silica by use of plasma-enhanced chemical vapor deposition in a Helicon plasma reactor. The refractive-index profile of the fabricated lens was determined by the application of an inversion technique to the values of modal effective index measured with a prism coupler. The periodic refocusing property of the lens and the independence of the wavelength were measured with the fluorescence of a specially doped, thin polymer layer spin-coated onto the surface of the lens, # 1997 Optical Society of America
机译:通过在Helicon等离子体反应器中使用等离子体增强化学气相沉积技术,在掺氟的二氧化硅中设计并制造了具有抛物线轮廓的薄型一维梯度折射率平板透镜。通过将反演技术应用于由棱镜耦合器测量的模态有效折射率的值来确定所制造的透镜的折射率分布。镜头的周期性重聚焦特性和波长的独立性是通过旋涂在镜头表面的特殊掺杂的薄聚合物层的荧光来测量的,美国#1997光学学会

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