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Use of confocal microscopes in conoscopy and ellipsometry. 1. Electromagnetic theory

机译:共聚焦显微镜在椭圆镜和椭圆镜检查中的使用。 1.电磁理论

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An optical system consisting of two objective lenses in a confocal arrangement is examined. It is shown that a simple algebraic relation exists between the electric field in the back focal plane of the first objective lens, which focuses the incident light, and the Fourier transform of the electric field in the focal plane of the same lens. The relation holds for high angles. If a thin object is placed in the focal plane it is possible to write the electric field by use of a Fourier transform relation at the exit aperture of the second lens. The theory is generalized for objects that are positioned at oblique angles with respect to the optical axis of the system. This configuration is clearly identical to the setup of a spatially resolving ellipsometer.
机译:考察了由两个共焦排列的物镜组成的光学系统。示出了在第一物镜的后焦平面中的电场(其聚焦入射光)与同一透镜的焦平面中的电场的傅立叶变换之间存在简单的代数关系。该关系适用于大角度。如果将薄物体放置在焦平面中,则可以通过在第二透镜的出射孔处使用傅立叶变换关系来写入电场。该理论适用于相对于系统光轴倾斜的物体。这种配置显然与空间分辨椭圆仪的设置相同。

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