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Convex grating types for concentric imaging spectrometers

机译:同心成像光谱仪的凸光栅类型

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The properties of convex gratings fabricated by electron-beam lithography are investigated. Three grating types are shown. The first is a single-panel, true blazed grating in which the blaze angle stays constant relative to the local surface normal. This grating provides high peak efficiencies of approximately 88% in the first order and 85% in the second order. The second grating has two concentric panels, with each panel blazed at a different angle. This type permits flexibility in matching the grating response to a desired form. The third type has a groove shape that departs from the sawtooth blazed profile to increase the second-order bandwidth. All these types are difficult or impossible to produce with conventional techniques. The gratings compare favorably with conventional (holographic and ruled) types in terms of efficiency and scatter. Simple scalar models are shown to predict the wavelength response accurately. These gratings allow the optical designer to realize fully the considerable advantages of concentric spectrometer forms. (C) 1998 Optical Society of America OCIS codes: 050.1940, 050.1950, 050.2770, 120.6200, 220.4000. [References: 22]
机译:研究了通过电子束光刻制造的凸形光栅的性能。显示了三种光栅类型。第一个是单面板真闪耀光栅,其中闪耀角度相对于局部表面法线保持恒定。该光栅的高峰值效率在第一级约为88%,在第二级约为85%。第二光栅具有两个同心面板,每个面板以不同的角度闪耀。这种类型允许将光栅响应匹配到所需形式的灵活性。第三类具有与锯齿闪耀轮廓不同的凹槽形状,以增加二阶带宽。用常规技术很难或不可能生产所有这些类型。在效率和散射方面,光栅与常规(全息和直纹)类型相比是有利的。显示了简单的标量模型可以准确预测波长响应。这些光栅使光学设计人员可以充分实现同心光谱仪形式的显着优势。 (C)1998年美国光学学会OCIS代码:050.1940、050.1950、050.2770、120.6200、220.4000。 [参考:22]

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