We propose an in-line digital microscopic holography system for testing of microstructures. With the incorporation of a long-distance microscope with digital holography, the system is capable of imaging test microstructures with high resolution at sufficient working distances to permit good illumination of samples. The system, which was developed in an in-line configuration, achieves high imaging capacity and exhibits properties that are favorable for micromeasurement. We demonstrate the performance of the system with experiments to determine the displacement of a silicon microcantilever and with investigations of the microscopic resolution capability.
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