Scanning laser differential-heterodyne interferometer for flying-height measurement

摘要

With conventional optical interferometry flying-height testing, a stationary measurement beam and a two-axis moving stage are used to measure slider-disk spacing at different points on the slider. Pitch angle or roll angle is calculated on the basis of the measurement results. We report on a scanning differential-heterodyne interferometer, which measures the continuous flying-height variation along the edge of a slider with two continuously scanning laser beams. Pitch angle or roll angle can be obtained directly from the scanning measurement. The system can also measure points individually to obtain the absolute flying height at different locations on the slider. Experiments were performed to demonstrate the concept of scanning measurement. The flying-height variation along the slider edge was measured by continuous scan and by point-to-point moving. The measurement results from continuous scan coincided with those of conventional methods.