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Phase-shifting interferometry with uncalibrated phase shifts

机译:具有未校准相移的相移干涉术

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摘要

A computationally efficient algorithm for phase-shifting interferometry with imprecise phase shifts is developed. It permits the use of an uncalibrated phase shifter and is also insensitive to spatial intensity variations. The measurement has both spatial and temporal aspects. Comparisons are made between pixels within the same interferogram, and these comparisons are extended across a set of interferograms by a maximum-minimum procedure. A test experiment is performed and confirms the theoretical results. An additional advantage of the algorithm is that an error measure can be developed. This error measure is used to implement an error correction scheme.
机译:开发了一种计算效率高的相移不精确的相移干涉算法。它允许使用未经校准的移相器,并且对空间强度变化不敏感。测量具有空间和时间方面。在同一干涉图中的像素之间进行比较,并且通过最大最小过程将这些比较扩展到一组干涉图中。进行了测试实验并确认了理论结果。该算法的另一个优点是可以开发出误差度量。此错误度量用于实施错误纠正方案。

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