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Effect of fabrication errors in channel waveguide Bragg gratings

机译:通道波导布拉格光栅中制造误差的影响

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摘要

The spectral performances of nonideal rectangular Bragg gratings, integrated in a rib waveguide, are analyzed by a multilayer approach based on the effective-index method. The effects of errors on the photolithographic definition of the grating, that is, period and shape, and of errors on the control of etching depth are investigated. Also the influence of the stitching error, which is unavoidable when the grating is realized by means of electron-beam photolithography, is addressed. A novel analytical approach that extends coupled-mode theory to the analysis of real gratings is also presented.
机译:通过基于有效折射率方法的多层方法,分析了集成在肋形波导中的非理想矩形布拉格光栅的光谱性能。研究了误差对光栅光刻定义的影响,即周期和形状,以及误差对控制蚀刻深度的影响。还解决了缝合误差的影响,这在借助于电子束光刻实现光栅时是不可避免的。还提出了一种将耦合模式理论扩展到实际光栅分析的新颖分析方法。

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