ANALYSIS OF LATERAL SHEARING INTERFEROGRAMS BY USE OF ZERNIKE POLYNOMIALS

摘要

A modal phase-reconstruction method for wave-front analysis in lateral shearing interferometry is presented. Pseudo-Zernike polynomial functions describe the differential wave fronts and are related to a Zernike polynomial description of the original wave front. We show that this reconstruction is robust for shear ratios in the range 0.15-0.50. The error propagation properties of this differential Zernike polynomial matrix-inversion method are discussed on the basis of both analysis and simulation. It is concluded that the method allows wave-front analysis with an absolute inaccuracy of 2 m lambda rms for diffraction-limited wave fronts and with 1% relative inaccuracy for more strongly aberrated wave fronts. (C) 1996 Optical Society of America [References: 22]