Atomic-hydrogen mapping in hot-filament chemical-vapor deposition

摘要

Two-dimensional maps of the atomic-hydrogen concentration distribution were acquired with two-photon laser-induced fluorescence. The environment was a hot-filament chemical-vapor-deposition reactor used for polycrystalline diamond-film deposition. The maps were measured in situ under diamond-deposition conditions with variation of the growth parameters. The parameters investigated were filament temperature, input methane concentration, and total pressure.