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Influence of angle deposition on the properties of ZnTe thin films prepared by thermal evaporation

机译:角沉积对热蒸发制备的ZnTe薄膜性能的影响

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Thin films of ZnTe were deposited at angles of 0 degrees, 20 degrees, 40 degrees, 60 degrees and 80 degrees by thermal evaporation. The chemical, structural, morphological, optical, and photocurrent properties of ZnTe thin films were investigated. The elemental composition of the films was investigated by energy dispersive x-ray spectroscopy (EDX) and x-ray photoelectron spectroscopy (XPS). EDX and XPS analyses showed that at lower angles (0 degrees and 20 degrees), the deposited films were Te-rich, at 40 degrees, the deposited film was nearly stoichiometric; and at higher angles (60 degrees and 80 degrees), the deposited films were Zn-rich. X-ray diffraction (XRD) analysis showed that all films were polycrystalline. X-ray diffraction patterns showed that lower-angles-deposited films had an extra peak at 2 theta = 36.47 degrees that belongs to Te element. Atomic force microscopy analysis revealed that the surface roughness of films was increased by increasing the deposition angle from 0 degrees to 80 degrees because shadowing effect raised due to an oblique angle. It was observed that higher-angles-deposited films (ZnTe-60 degrees, and ZnTe-80 degrees) showed less transmittance and high reflectance compared to lower-angles-deposited films because of high metallic Zn content in these films. Current voltage (I-V) measurements showed that nearly stoichiometric (ZnTe-40 degrees) film showed better photocurrent response compared to non-stoichiometric films (ZnTe-0 degrees, ZnTe-20 degrees, ZnTe-60 degrees, and ZnTe-80 degrees).
机译:通过热蒸发以0度,20度,40度,60度和80度的角度沉积ZnTe的薄膜。研究了ZnTe薄膜的化学,结构,形态学,光学和光电流性质。通过能量分散X射线光谱(EDX)和X射线光电子谱(XPS)研究了膜的元素组成。 EDX和XPS分析表明,在较低的角度(0度和20度),沉积的薄膜在40度下富含Te,沉积的膜几乎是化学计量的;并且在更高的角度(60度和80度),沉积的薄膜富含锌。 X射线衍射(XRD)分析显示所有薄膜是多晶的。 X射线衍射图案表明,低角度沉积的薄膜在2θ= 36.47度属于TE元素的额外峰值。原子力显微镜分析显示,由于由于倾斜角度升高的阴影效果而增加,通过将沉积角增加到80度来增加膜的表面粗糙度。观察到,与这些薄膜中的高金属Zn含量,与低角度沉积的薄膜相比,观察到更高角度的沉积膜(ZnTe-60度和ZnTe-80度)表现出较少的透射率和高反射率。电流电压(I-V)测量表明,与非化学计量膜(ZnTe-0度,ZnTe-20度,ZnTe-60度和ZnTe-80度)相比,几乎化学计量(ZnTe-40度)膜显示出更好的光电流响应。

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