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Thermal stability of L1(0)-FePt nanodots patterned by self-assembled block copolymer lithography

机译:L1(0) - 由自组装嵌段共聚物光刻图案化的L1(0)的热稳定性

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摘要

Arrays of 14 nm thick L1(0)-FePt nanodots with diameter of 27 nm and center-to-center spacing of 39 nm were produced by block copolymer patterning of an FePt film and their magnetic reversal and thermal stability were characterized. A self-assembled polystyrene-b-polydimethylsiloxane diblock copolymer film was used as a lithographic mask and a pattern transfer process based on ion beam etching and rapid thermal annealing of the sputtered FePt film was developed. The dot arrays exhibited perpendicular magnetic anisotropy with K = 4.8 x 10(7) erg cm(-3) and a saturation magnetization of 960 emu cm(-3). First order reversal curves indicate a softer magnetic component attributed to the ion-milled material at the edges of the dots. The switching volume and the thermal stability were obtained from relaxation measurements and DC demagnetization curves. Micromagnetic simulations reproduce the magnetic domain structure obtained for the continuous and patterned FePt thin film.
机译:通过嵌段共聚物的嵌段共聚物图案化了14nm厚的L1(0)-Fept纳米蛋白,其直径为27nm,中心间距为39nm,并表征它们的磁性反转和热稳定性。 使用自组装的聚苯乙烯-B-聚二甲基硅氧烷二嵌段共聚物膜作为光刻掩模,并且开发了基于离子束蚀刻的图案转移过程和溅射备孔的快速热退火。 点阵列显示出垂直磁各向异性,k = 4.8×10(7)ERG cm(-3)和960 emu cm(-3)的饱和磁化强度。 第一阶逆转曲线表示归因于在点边缘处的离子研磨材料的更柔软的磁性分量。 从松弛测量和DC退磁曲线获得切换容积和热稳定性。 微磁性仿真再现为连续和图案化的扫描薄膜获得的磁畴结构。

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