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首页> 外文期刊>The journal of physical chemistry, A. Molecules, spectroscopy, kinetics, environment, & general theory >Fundamental Optical Properties of Linear and Cyclic Alkanes: VUV Absorbance and Index of Refraction
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Fundamental Optical Properties of Linear and Cyclic Alkanes: VUV Absorbance and Index of Refraction

机译:线性和环状烷烃的基本光学性质:VUV吸光度和折射率

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摘要

VUV absorbance and index of refraction data for a series of linear and cyclic alkanes have been collected in order to understand the relationship between the electronic excitation wavelength (or absorbance edge), index of refraction, and molecular structure. The absorbance edge and index for a homologous series of both linear and cyclic alkanes increase with increasing carbon number. The optical properties of complex cycloalkanes do not vary predictably with increasing carbon number but instead depend on variations in the hydrocarbon structure in addition to hydrocarbon size. An understanding of the fundamental optical properties of this class of compounds is directly applicable to the identification of a high index and low-absorbance fluid for 193 nm immersion lithography.
机译:为了了解电子激发波长(或吸收边缘),折射率和分子结构之间的关系,已经收集了一系列线性和环状烷烃的VUV吸收率和折射率数据。线性和环状烷烃的同源系列的吸光度边和折射率随碳原子数的增加而增加。复杂的环烷烃的光学性质不会随碳原子数的增加而发生可预测的变化,而是取决于除碳氢化合物大小外的碳氢化合物结构变化。对这类化合物的基本光学性质的理解可直接用于鉴定193 nm浸没式光刻法的高折射率和低吸收率流体。

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