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A study of Joule heating-induced breakdown of carbon nanotube interconnects

机译:焦耳热诱导的碳纳米管互连击穿研究

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摘要

We investigate breakdown of carbon nanotube (CNT) interconnects induced by Joule heating in air and under high vacuum conditions (10~(-5)mbar). A CNT with a diameter of 18nm, which is grown by chemical vapor deposition to connect opposing titanium nitride (TiN) electrodes, is able to carry an electrical power up to 0.6mW before breaking down under vacuum, with a corresponding maximum current density up to 8 × 10~7Acm ~(-2) (compared to 0.16mW and 2 × 10~7Acm~(-2) in air). Decoration with electrochemically deposited Ni particles allows protection of the CNT interconnect against oxidation and improvement of the heat release through the surrounding environment. A CNT decorated with Ni particles is able to carry an increased electrical power of about 1.5mW before breaking down under vacuum, with a corresponding maximum current density as high as 1.2 × 10~8Acm~(-2). The Joule heating produced along the current carrying CNT interconnect is able to melt the Ni particles and promotes the formation of titanium carbon nitride which improves the electrical contact between the CNT and the TiN electrodes.
机译:我们研究了在空气中和高真空条件下(10〜(-5)mbar)的焦耳加热引起的碳纳米管(CNT)互连的击穿。通过化学气相沉积法生长以连接相对的氮化钛(TiN)电极的直径为18nm的CNT能够承载高达0.6mW的电功率,然后在真空下分解,相应的最大电流密度可达8×10〜7Acm〜(-2)(相比于空气中的0.16mW和2×10〜7Acm〜(-2))。用电化学沉积的Ni颗粒进行的装饰可保护CNT互连免受氧化并改善通过周围环境释放的热量。用Ni颗粒装饰的CNT能够在真空下击穿之前增加大约1.5mW的电功率,相应的最大电流密度高达1.2×10〜8Acm〜(-2)。沿载流CNT互连产生的焦耳热能够熔化Ni颗粒并促进形成氮化钛碳,从而改善CNT与TiN电极之间的电接触。

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