The ion beam induced nanoscale synthesis of platinum nanowires using the trimethyl (methylcyclopentadienyl)platinum(IV) (MeCpPt~(IV)Me3) precursor is investigated using helium and neon ion beams in the gas field ion microscope. The He~+ beam induced deposition resembles material deposited by electron beam induced deposition with very small platinum nanocrystallites suspended in a carbonaceous matrix. The He~+ deposited material composition was estimated to be 16% Pt in a matrix of amorphous carbon with a large room-temperature resistivity (～3.5 × 10~4-2.2 × 10~5 μΩ cm) and temperature-dependent transport behavior consistent with a granular material in the weak intergrain tunnel coupling regime. The Ne~+ deposited material has comparable composition (17%), however a much lower room-temperature resistivity (～600-3.0 × 10~3 μΩ cm) and temperature-dependent electrical behavior representative of strong intergrain coupling. The Ne~+ deposited nanostructure has larger platinum nanoparticles and is rationalized via Monte Carlo ion-solid simulations which show that the neon energy density deposited during growth is much larger due to the smaller ion range and is dominated by nuclear stopping relative to helium which has a larger range and is dominated by electronic stopping.
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