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Fabrication and MFM study of 60 nm track-pitch discrete track media

机译:60 nm轨道间距离散轨道介质的制作和MFM研究

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摘要

Discrete track magnetic recording media with a 60 nm track pitch and prewritten servo patterns were fabricated and tested for read/write performance, and a feasibility analysis of the embedded servo was performed. The fabrication process consisted of ultraviolet nanoimprint lithography (UV-NIL) and sequential ion beam etching on a conventional perpendicular magnetic recording medium. Magnetic patterns were written to the fabricated tracks at 700 kilo flux changes per inch (kFCI) using a spin stand and were read using magnetic force microscopy (MFM), with a resulting signal-to-noise ratio (SNR) of 12.15 dB. The servo pattern was also visualized with MFM. These results demonstrated the feasibility of writing to a 30 nm wide discrete data track and the workability of the embedded servo pattern.
机译:制作了具有60 nm磁道间距的离散磁道磁记录介质和预写的伺服模式,并测试了其读/写性能,并对嵌入式伺服系统进行了可行性分析。制造过程包括紫外纳米压印光刻(UV-NIL)和在常规垂直磁记录介质上的顺序离子束蚀刻。使用自旋支架以每英寸700千通量变化(kFCI)的方式将磁图样写入制造的磁道,并使用磁力显微镜(MFM)读取磁图样,得到的信噪比(SNR)为12.15 dB。伺服模式也通过MFM可视化。这些结果证明了写入30 nm宽的离散数据磁道的可行性以及嵌入式伺服模式的可操作性。

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