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Photo-induced electrochemical anodization of p-type silicon: Achievement and demonstration of long term surface stability

机译:p型硅的光致电化学阳极氧化:长期表面稳定性的成就和证明

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摘要

Surface stability is achieved and demonstrated by porous silicon (PS) fabricated using a wavelength-dependent photo-electrochemical (PEC) anodization technique. During anodization, the photon flux for all wavelengths was kept constant while only the effect of light wavelength on the surface morphology of PS was investigated. PS optical sensors were realized, characterized and tested using a photoluminescence (PL) quenching technique. An aliphatic chain of alcohols (methanol to n-octanol) was detected in the range of 10200ppm. Long term surface stability was observed from samples prepared under red (750620nm) and green illumination (570495 nm), where the PL quenching cycles evoke the possibility of using PS for stable sensor device applications. This study provides a route for preparing highly sensitive organic vapour sensors with a precise selection of the fabrication parameters and demonstrating their prolonged performance.
机译:通过使用基于波长的光电化学(PEC)阳极氧化技术制造的多孔硅(PS)可以实现并证明其表面稳定性。在阳极氧化过程中,所有波长的光子通量保持恒定,而仅研究了光波长对PS表面形态的影响。使用光致发光(PL)淬灭技术实现,表征和测试PS光学传感器。检测到的脂肪族醇链(甲醇到正辛醇)的范围为10200ppm。在红色(750620nm)和绿色(570495nm)照明下制备的样品中观察到了长期的表面稳定性,其中PL猝灭循环使人们有可能将PS用于稳定的传感器设备应用。这项研究为制备高度敏感的有机蒸汽传感器提供了一条途径,可以精确选择制造参数并证明其具有较长的性能。

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