Measurement of the surface form error of large aperture plane optical surfaces with a polarization phase-shifting liquid reference reflection Fizeau interferometer

摘要

A polarization phase-shifting liquid reference reflection Fizeau interferometer has been proposed. A polarization cyclic path optical configuration along with a concave telescope mirror is used to produce a pair of expanded, collimated p and s polarized beams with a small angular separation between them. The collimated beams are deflected along a vertical direction toward a Fizeau interferometer cavity formed between a liquid surface that acts as a reference surface and a plane test surface. Either the p or s polarized beam is allowed to strike the liquid surface normally and the orientation of the test surface is adjusted to reflect the other beam, having orthogonal linear polarization, in the direction of the normally reflected reference beam from the liquid surface. A combination of a quarter-wave plate and linear polarizer is used to apply polarization phase shift between the test and reference beams, and quantitative surface form error is measured by applying phase-shifting interferometry. A method for elimination of the residual system aberration is discussed. Results obtained for an optically polished BK-7 disk of clear aperture diameter approximate to 160 mm are presented. (C) 2016 Optical Society of America