Two-dimensional high-speed and long-range tomography and profilometry using liquid-crystal Fabry-Perot resonator

摘要

A two-dimensional high-speed, long-range tomography and profilometry based on a low-coherence optical interferometry has been developed. A liquid-crystal Fabry-Perot resonator is fabricated to be a low-coherence optical frequency comb generator for expanding the measurement depth of the tomography and profilometry. The line-shape interference fringes with the individual fringe orders are obtained by a CCD camera in real time. The relative optical length, corresponding to the sample depth information, can be derived from the positions of the interference fringes on the CCD camera and their corresponding fringe orders. The fringe orders can be rapidly calculated using the effectiveness of the changeable extraordinary refractive index of the liquid-crystal material of the resonator. The finesse of the liquid-crystal resonator is approximate 9, giving an expansion of the measurement range of up to 9-fold (similar to 8 mm depth) with a resolution of profilometry and tomography of 3.7 mu m and 11 mu m, respectively. (C) 2015 Optical Society of America