High-resolution moire interferometry for quantitative low-cost, real-time surface profilometry

摘要

A two-dimensional optical profilometry system has been developed in which fringe projection and image processing methods allow for image acquisition and analysis at video frame rates with mu m-scale precision in an inexpensive portable device. The device presented can be used to interrogate any uniformly reflective surface, imaging an area of approximately 10 square centimeters and providing a real-time digital display of the surface's contours. The presented system has the ability to resolve surface features with a lateral resolution of <50 mu m and <15 mu m in height. (C) 2015 Optical Society of America